双束聚焦离子束系统 Dual-Beam Focused Ion Beam System
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设备型号
Helios 5 UX -
当前状态
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管理员
侯雨箫 Yuxiao HOU,应哲涵 Zhehan YING -
放置地点
W2-133
- 仪器信息
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- 检测项目
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名称
双束聚焦离子束系统 Dual-Beam Focused Ion Beam System
资产编号
MC-MP-0001
型号
Helios 5 UX
规格
Helios 5 UX
产地
厂家
Thermo Fisher Scientific Brno s.r.o
所属品牌
Thermo Fisher Scientific Brno s.r.o
出产日期
购买日期
所属单位
材料表征与制备中央实验室 Materials Characterization and Preparation Facility (GZ)
使用性质
科研
所属分类
MCPF-材料制备 Material Preparation
资产负责人
侯雨箫 Yuxiao HOU
联系电话
联系邮箱
yuxiaohou@hkust-gz.edu.cn
放置地点
W2-133
- 主要规格&技术指标
- 主要功能及特色
主要规格&技术指标
1. 分析用Bi离子源， 离子束流：＞40nA，最大重复速率：50 kHz (对于所有操作模式)。脉冲离子束流：≥40 pA，最小脉冲束流直径：≤50 nm（高分辨成像模式）； 可以提供快速成像模式，最小束斑直径：≤90nm @ 350pA DC
2. 软硬件上支持G-SIMS分析，可以对有机大分子进行G-SIMS分析，可以实时改变G参数，改变分子离子峰和碎片峰比值，有助于有机大分子判定。
3. 分析灵敏度> 8.0×108 Al+/nC @ 7000（FWHM）。分析绝缘体时质量分辨(on PET：104amu)：≥18000 (半峰宽；100%传输率)
4. 高性能Orbitrap 质谱仪，质量精度：< 1 ppm (RMS)，使得Ar离子团簇离子源最小离子束斑＜3um。
5. EDR Analyzer：线性响应范围内最大计数率 > 1×107 次/秒
1. Bi ion source for analysis, ion beam current: >40 nA, maximum repetition rate: 50 kHz (for all modes of operation). Pulsed ion beam current: ≥ 40 pA, minimum pulsed beam diameter: ≤ 50 nm (for high-resolution imaging modes). Fast imaging mode available, minimum beam spot diameter: ≤ 90 nm @ 350 pA DC
2. G-SIMS analysis is supported in hardware and software, and G-SIMS analysis can be performed on organic macromolecules, and the G parameter can be changed in real time to change the molecular ion peak and fragment peak ratio, which helps to determine organic macromolecules.
3. Analytical sensitivity > 8.0×108 Al+/nC @ 7000 (FWHM). Mass resolution when analyzing insulators (on PET: 104amu): ≥ 18000 (half-peak width; 100% transmission rate)
4. High-performance Orbitrap mass spectrometer with mass accuracy: < 1 ppm (RMS), enabling Ar ion cluster ion sources with minimum ion beam spot < 3um.
5. EDR Analyzer: maximum count rate > 1×107 counts/sec in linear response range
2. 软硬件上支持G-SIMS分析，可以对有机大分子进行G-SIMS分析，可以实时改变G参数，改变分子离子峰和碎片峰比值，有助于有机大分子判定。
3. 分析灵敏度> 8.0×108 Al+/nC @ 7000（FWHM）。分析绝缘体时质量分辨(on PET：104amu)：≥18000 (半峰宽；100%传输率)
4. 高性能Orbitrap 质谱仪，质量精度：< 1 ppm (RMS)，使得Ar离子团簇离子源最小离子束斑＜3um。
5. EDR Analyzer：线性响应范围内最大计数率 > 1×107 次/秒
1. Bi ion source for analysis, ion beam current: >40 nA, maximum repetition rate: 50 kHz (for all modes of operation). Pulsed ion beam current: ≥ 40 pA, minimum pulsed beam diameter: ≤ 50 nm (for high-resolution imaging modes). Fast imaging mode available, minimum beam spot diameter: ≤ 90 nm @ 350 pA DC
2. G-SIMS analysis is supported in hardware and software, and G-SIMS analysis can be performed on organic macromolecules, and the G parameter can be changed in real time to change the molecular ion peak and fragment peak ratio, which helps to determine organic macromolecules.
3. Analytical sensitivity > 8.0×108 Al+/nC @ 7000 (FWHM). Mass resolution when analyzing insulators (on PET: 104amu): ≥ 18000 (half-peak width; 100% transmission rate)
4. High-performance Orbitrap mass spectrometer with mass accuracy: < 1 ppm (RMS), enabling Ar ion cluster ion sources with minimum ion beam spot < 3um.
5. EDR Analyzer: maximum count rate > 1×107 counts/sec in linear response range
主要功能及特色
1.新型 Phoenix 离子镜筒具有卓越的低电压性能，可为TEM和 APT应用提供最高质量、定点、超薄样品制备
2.AutoTEM 5全自动透射电镜样品制备软件，实现最快、最简单、全自动、无人值守、TEM样品制备和横截面加工
3.最佳 Elstar 电子镜筒搭载 SmartAlign和 FLASH闪调技术，可为任何经验水平的用户在最短时间内获取纳米尺度信息
4.电子枪搭载全新一代大束流 UC+ 单色器技术可在低电压下提供亚纳米分辨率，揭示最细节的信息，电子束分辨率1KV下高达0.7nm
5.多达6个集成化镜筒内及透镜下探测器，采集优质、锐利、无荷电图像，提供最完整的样品信息
6.Auto slice&view 4 软件，精确定位感兴趣区域，获取最高质量、多模态内部和三维信息，全自动三维切片及成像，可实现三维EDS&EBSD重构
7.纳米原型制备，可实现小于 10 nm 复杂结构的快速、精确加工、刻蚀和沉积
8.高精度、高稳定度的 150 mm行程压电陶瓷驱动样品台和样品仓Nav-Cam光学导航相机实现精确样品导航
1.New Phoenix ion microscope cartridges offer excellent low voltage performance for the highest quality, spot-on, ultra-thin sample preparation for TEM and APT applications
2.AutoTEM 5 fully automated TEM sample preparation software for the fastest, easiest, fully automated, unattended TEM sample preparation and cross-sectional processing
3.Best Elstar Electron Microscope Cartridges with Smart Align and FLASH technology to obtain nano-scale information in the shortest time for users of any experience level
4.A new generation of High Current UC+ Monochromator Technology in the electron gun provides sub-nanometer resolution at low voltages, revealing the most detailed information, with an electron beam resolution of up to 0.7nm at 1KV
5.Up to 6 integrated in-barrel and under-lens detectors to capture high quality, sharp, charge-free images and provide the most complete sample information
6.Auto Slice&View 4 Software to precisely locate the region of interest, acquire the highest quality, multi-modal internal and 3D information, fully automated 3D slicing and imaging, and enable 3D EDS & EBSD reconstruction
7.Nano-Prototype Preparation for fast and accurate processing, etching and deposition of complex structures smaller than 10 nm
8.Highly accurate and stable 150 mm stroke piezoelectric ceramic driven sample stage and sample chamber Nav-Cam optical navigation camera for precise sample navigation
2.AutoTEM 5全自动透射电镜样品制备软件，实现最快、最简单、全自动、无人值守、TEM样品制备和横截面加工
3.最佳 Elstar 电子镜筒搭载 SmartAlign和 FLASH闪调技术，可为任何经验水平的用户在最短时间内获取纳米尺度信息
4.电子枪搭载全新一代大束流 UC+ 单色器技术可在低电压下提供亚纳米分辨率，揭示最细节的信息，电子束分辨率1KV下高达0.7nm
5.多达6个集成化镜筒内及透镜下探测器，采集优质、锐利、无荷电图像，提供最完整的样品信息
6.Auto slice&view 4 软件，精确定位感兴趣区域，获取最高质量、多模态内部和三维信息，全自动三维切片及成像，可实现三维EDS&EBSD重构
7.纳米原型制备，可实现小于 10 nm 复杂结构的快速、精确加工、刻蚀和沉积
8.高精度、高稳定度的 150 mm行程压电陶瓷驱动样品台和样品仓Nav-Cam光学导航相机实现精确样品导航
1.New Phoenix ion microscope cartridges offer excellent low voltage performance for the highest quality, spot-on, ultra-thin sample preparation for TEM and APT applications
2.AutoTEM 5 fully automated TEM sample preparation software for the fastest, easiest, fully automated, unattended TEM sample preparation and cross-sectional processing
3.Best Elstar Electron Microscope Cartridges with Smart Align and FLASH technology to obtain nano-scale information in the shortest time for users of any experience level
4.A new generation of High Current UC+ Monochromator Technology in the electron gun provides sub-nanometer resolution at low voltages, revealing the most detailed information, with an electron beam resolution of up to 0.7nm at 1KV
5.Up to 6 integrated in-barrel and under-lens detectors to capture high quality, sharp, charge-free images and provide the most complete sample information
6.Auto Slice&View 4 Software to precisely locate the region of interest, acquire the highest quality, multi-modal internal and 3D information, fully automated 3D slicing and imaging, and enable 3D EDS & EBSD reconstruction
7.Nano-Prototype Preparation for fast and accurate processing, etching and deposition of complex structures smaller than 10 nm
8.Highly accurate and stable 150 mm stroke piezoelectric ceramic driven sample stage and sample chamber Nav-Cam optical navigation camera for precise sample navigation
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检测项目
附件下载
公告
同类仪器
