三维原子探针又叫原子探针层析技术是目前唯一一种可提供原子级三维立体图像和化学成分度量的材料分析技术，深度分辨率可达0.1-0.3nm，横向分辨率可达0.3-0.5nm，适合于研究纳米尺度的微小结构（沉淀、团簇、GP区等）的尺寸、分布及成分，以及元素在各种内界面（晶界、相界、多层膜结构中的层间界面等）的偏聚行为。
其工作原理是给针尖形状的样品加上一个基本高电压并辅以电脉冲或激光脉冲使得样品中的原子逐个被场离化。离化后的离子进入飞行时间质谱仪到达具有二维位置分辨功能的探测器上并记录飞行时间，到达时间以及二维位置。通过计算机模拟技术得到组成样品的各种元素原子在空间的分布图，从而进一步进行定量分析。
该技术提供了独有的材料在小体积内原子级分辨率的元素分布层析图，可用于分析包括金属、半导体器件、纳米材料、矿物、以及有机和生物材料等。

Atom Probe Tomography is the only material analysis technique offering extensive capabilities for both 3D imaging and chemical composition measurements at the atomic scale (around 0.1-0.3nm resolution in depth and 0.3-0.5nm laterally). It is able to study the size, distribution, and composition of nano-scale microstructures (such as precipitates, clusters, and GP zones), as well as the segregation behavior at various internal interfaces (such as grain boundaries, phase boundaries, and interlayer interfaces in multilayer structures).
The working principle involves applying a high voltage to a needle-shaped sample, supplemented by electrical pulses or laser pulses, one or more atoms are evaporated from the surface, by field effect (near 100% ionization), and projected onto a Position Sensitive Detector with a very high detection efficiency.
This technique provides unique tomographic maps of elemental distribution at atomic level within small volumes of materials covering metals, semiconductor devices, nanomaterials, minerals, as well as organic and biological materials.

APT样品要求：
1.针尖状样品；
2.样品尖端曲率半径50-100nm；
3.所关注的结构距离样品顶50-200nm；
4.样品必须能放到APT系统的样品托Puck上。

由于测试成功率及结果与制样有密切关系，制样前请先联系沟通制样要求。

APT Sample Requirements:
1.Needle-shaped specimen.
2.Tip curvature radius of the specimen should be between 50 and 100 nm.
3.Region of interest should be located within 50–200 nm from the top of the specimen.
4.Specimen must be able to fit onto the APT sample holder (Puck).

Success rate and results of the test are closely related to sample preparation, please contact us to discuss the sample preparation requirements before proceeding.